Regarding the dusty free clean room while under working, in addition to testing and controlling the cleanliness, temperature and humidity, the noise standards are also required to be controlled. Human and purification analysis of clean room noise standards and clean room noise control methods.
The exhaust system noise has a great impact on the clean room. Take the integrated circuit production as an example, in the production process, epitaxial, diffusion, corrosion, cleaning and other processes need to set up the exhaust system.
In recent years, noise treatment has been paid increasingly attention to clean room plant exhaust system, pay attention to the selection of low noise fans. The sealing performance of the clean room is good, and the noise is not easy for attenuation. Due to the quiet working environment requirements of the clean room, reducing the air duct wind speed according to the regulations not only reduces the resistance of the purification air conditioning system, reduces the pressure head and speed of the fan, weakens the noise of the fan, and prevents the additional noise caused by the large wind speed.
In the clean room environment, the noise conditions mainly are to ensure normal operation, meet the necessary conversation and contact, and provide a comfortable working environment. The vast majority of criteria give allowable values in the 65 – 70dB (A) range.
